Empowering Scientific Discovery

Shanghai Microwell Semiconductor Technology Co., Ltd.

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BrandWEP
OriginGermany
ModelCVP21
Measurement PrincipleElectrochemical Capacitance–Voltage (ECV) Profiling
Carrier Concentration Range1×10¹¹ to 1×10²¹ cm⁻³
Depth ResolutionDown to ≤1 nm
Compatible SubstratesConductive & insulating
Wafer Size Support4×2 mm² to 200 mm (8″)
Material CompatibilitySi, Ge, SiC, GaAs, InP, GaN, AlGaN, InGaN, AlInN, ZnO, CdTe, HgCdTe, and multicomponent III–V/II–VI compounds
Automation LevelFully automated with real-time corrosion monitoring, dry-in/dry-out handling, and camera-assisted process control
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BrandToho
OriginJapan
ModelECVpro+
Measurement PrincipleElectrochemical C–V Profiling
Carrier Concentration Range1×10¹¹ to 1×10²¹ cm⁻³
Depth ResolutionDown to ≤1 nm
Sample CompatibilitySi, Ge, SiC, GaAs, InP, GaN, AlGaN, InGaN, AlInN, ZnO, CdTe, HgCdTe, and multicomponent III–V/II–VI semiconductors
Automation LevelFully Automated (Dry-In/Dry-Out, Auto-Load/Unload/Reload)
System ArchitectureModular, Cleanroom-Compatible, Optically & Electrically Isolated Subsystems
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