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| Brand | HalfMoon |
|---|---|
| Origin | Japan |
| Wavelength Range | 190–1100 nm |
| Thickness Measurement Range | 1 nm – 250 µm |
| Optical Configuration | Non-contact, Spectroscopic Interferometry |
| Detector | PDA or CCD, 512-channel, thermoelectrically cooled |
| Light Sources | Deuterium (D₂) lamp (UV), Tungsten-Halogen (W) lamp (Vis), D₂ + W combination |
| Standard Measurement Aperture | Microscope-coupled objective port |
| Compliance | Designed for ISO/IEC 17025-aligned lab environments, compatible with GLP/GMP data integrity workflows (audit trail, user access control, electronic signatures per FDA 21 CFR Part 11) |
| Brand | Sinton Instruments |
|---|---|
| Origin | USA |
| Model | WCT-120MX + Suns-VocMX |
| Minority Carrier Lifetime Range | 0.1 µs – 15 ms |
| Penetration Depth | 3 mm |
| Sample Diameter | Up to 230 mm |
| Resistivity Range | 0.15 – 300 Ω·cm |
| Material Compatibility | Silicon wafers |
| Brand | HalfMoon |
|---|---|
| Origin | Japan |
| Model Series | FE-300V / FE-300UV / FE-300NIR / FE-300NIR+ |
| Optical Principle | Normal-Incidence Spectroscopic Reflectometry (Spectroscopic Reflectance Analysis) with Nonlinear Least-Squares Fitting of Optical Constants (n, k) |
| Wavelength Ranges | 450–780 nm (FE-300V), 300–800 nm (FE-300UV), 900–1600 nm (FE-300NIR), 1470–1600 nm (FE-300NIR+) |
| Thickness Range | 10 nm – 1.5 mm (model-dependent) |
| Thickness Accuracy | ≤ ±0.2 nm (for thin films < 1 µm) |
| Repeatability (2σ) | ≤ 0.1 nm |
| Spot Size | ~Φ3 mm |
| Max Sample | 8-inch wafer (≤5 mm thick) |
| Measurement Time | 0.1–10 s per point |
| Light Sources | Tungsten-halogen lamp (V/NIR), Deuterium lamp (UV) |
| Interface | USB 2.0 |
| Dimensions | 280 × 570 × 350 mm (W×D×H) |
| Weight | ~24 kg |
| Software | Standard reflectance peak/valley analysis, FFT, optimization-based fitting, nonlinear least-squares inversion |
| Optional Modules | Multi-layer optical model builder, reference standard calibration suite, dispersion-corrected material database |
| Brand | HalfMoon |
|---|---|
| Origin | Japan |
| Model | 1 |
| Wavelength Range | 300–800 nm |
| Incident/Reflectance Angle Range | 45°–90° |
| Measurement Method | Rotating Polarizer Element Configuration |
| Sample Stage | Manual Positioning (100 × 100 mm Max) |
| Spectral Detection | Polychromator-Based Multi-Channel Detection (≥400 Wavelength Channels) |
| Angle Drive Mechanism | Sine-Bar Actuated Reflectance Angle Adjustment |
| Optical Constants Output | Refractive Index (n) and Extinction Coefficient (k) |
| Dimensions | 650 H × 400 D × 560 W mm |
| Weight | ~50 kg |
| Brand | Sinton Instruments |
|---|---|
| Origin | USA |
| Model | WCT-120 |
| Minority Carrier Lifetime Range | 0.1 µs – 15 ms |
| Penetration Depth | 3 mm |
| Sample Diameter | up to 210 mm |
| Resistivity Measurement Range | 0.15 – 300 Ω·cm |
| Test Material | Silicon Wafers |
| Brand | HalfMoon |
|---|---|
| Origin | Japan |
| Model | MCPD-9800 / MCPD-3700 / MCPD-7700 |
| Wavelength Range | MCPD-9800: 360–1100 nm (High Dynamic Range) |
| MCPD-3700 | 220–1000 nm (UV-Vis-NIR) |
| MCPD-7700 | 220–1100 nm (High Sensitivity) |
| Compliant with ISO 13655 | 2017 (Spectral Measurement of Reflectance and Transmittance) and ASTM E308-22 (Computing CIE Colors from Spectrophotometric Data) |
| Brand | Rayscience |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | WCT-120 |
| Measurement Principle | QSSPC (Quasi-Steady-State Photoconductance) |
| Lifetime Range | 100 ns – 10 ms |
| Test Modes | QSSPC, Transient, Lifetime Normalization Analysis |
| Resistivity Range | 3–600 Ω/sq. (undoped) |
| Carrier Injection Range | 1×10¹³ – 1×10¹⁶ cm⁻³ |
| Sensor Diameter | 40 mm |
| Sample Diameter | 40–210 mm (customizable down to smaller sizes) |
| Silicon Thickness | 10–2000 µm |
| Ambient Temperature | 20–25 °C |
| Power Consumption | Tester: 40 W |
| Controller PC | 200 W |
| Light Source | 60 W |
| Input Voltage | 100–240 VAC, 50/60 Hz |
| Brand | HalfMoon |
|---|---|
| Origin | Japan |
| Supplier Type | Authorized Distributor |
| Import Status | Imported |
| Wavelength Range | 250–800 nm (optional 350–1000 nm) |
| Thickness Measurement Range | 0.1 nm to >10 µm |
| Detector | Thermoelectrically Cooled Photodiode Array, 512 channels |
| Angle of Incidence/Reflection | 45°–90° (motorized, fully adjustable) |
| Power Supply | AC 1500 VA |
| Dimensions (H×D×W) | 1300 × 900 × 1750 mm |
| Weight | ~350 kg |
| Measurement Principle | Spectroscopic Ellipsometry (SE) |
| Brand | HalfMoon |
|---|---|
| Origin | Japan |
| Model | 01 |
| Type | In-situ, Fiber-optic-based Spectroscopic Reflectometry System |
| Deployment | Inline/At-line Integration for Semiconductor Processing Equipment |
| Environmental Rating | Vacuum-Compatible (up to 1×10⁻⁶ Pa), Cleanroom Class 100 Certified |
| Measurement Principle | Broadband Spectral Reflectometry (400–1100 nm) with Real-time Interference Analysis |
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