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| Brand | BM |
|---|---|
| Origin | Shanghai, China |
| Model | U1510 |
| Instrument Type | Floor-standing SEM |
| Electron Source | Tungsten Filament |
| Vacuum Modes | High Vacuum & Variable Pressure (6–270 Pa) |
| Secondary Electron Resolution | 3.0 nm @ 30 kV (High Vacuum) |
| Backscattered Electron Resolution | 4.0 nm @ 30 kV (6 Pa, Low Vacuum) |
| Magnification Range | 5× to 300,000× |
| Accelerating Voltage | 0.3–30 kV |
| Max Sample Diameter | 153 mm |
| Stage Travel | X 0–80 mm, Y 0–40 mm, Z 5–50 mm, T –20° to +90°, R 360° |
| Standard Detectors | Everhart-Thornley-type Secondary Electron Detector (SED), High-Sensitivity Semiconductor Backscattered Electron Detector (BSE) |
| Vacuum System | Single Turbo-Molecular Pump + Rotary Mechanical Pump |
| Safety Features | Power Failure Protection, Leakage Current Interlock, Automatic Shutdown |
| Brand | Shimadzu |
|---|---|
| Origin | Japan |
| Model | SPM-Nanoa |
| Instrument Type | Material-oriented AFM |
| Position Detection Noise | < 0.02 nm (RMS) |
| Sample Diameter | 50 mm |
| Sample Thickness | ≤ 8 mm |
| XY Stage Travel Range | 5 × 5 mm |
| Brand | BM |
|---|---|
| Origin | Shanghai, China |
| Model | TM3030 |
| Instrument Type | Desktop SEM |
| Electron Source | Pre-aligned Tungsten Filament |
| Accelerating Voltages | 5 kV, 15 kV |
| Magnification Range | 15× to 30,000× (with digital zoom: 2×, 4×) |
| Maximum Sample Diameter | 70 mm |
| Sample Stage Travel | X: ±17.5 mm, Y: ±17.5 mm |
| Detector System | High-sensitivity 4-segment semiconductor backscattered electron (BSE) detector |
| Vacuum System | Turbo-molecular pump (30 L/s), diaphragm pump (1 m³/h), ultimate vacuum ≤1.5×10⁻⁵ Pa, variable pressure mode (6–270 Pa, 22 steps) |
| Control Interface | Two USB 2.0 ports, Ethernet port |
| Operating System | Microsoft Windows® 7 or later |
| Display | 15.4-inch LCD (1280×800 resolution) |
| Auto-functions | Auto filament saturation, auto beam alignment, auto stigmation, auto focus, auto brightness/contrast, overcurrent protection, leakage circuit breaker |
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